A Research Center on Nanomaterials and Energy
 
New Clean Room
mardi 16 mars 2010
Categories : Facilities / News / Information

Professor Ricardo Izquierdo, from Department of Computer Science of UQAM and the NanoQAM research center start to make available a new clean room for all academic and industrial players into fields of nanotechnology and microelectronics.

OAI Hybralign Series 200 mask aligner (optical lithography)
OAI Hybralign Series 200 mask aligner (optical lithography)

This cleanroom includes research facilities as two masks aligners (optical lithography) and a Joule effect evaporator (thin film deposition of metals and organic materials). Also present in this room some equipments necessary for preparation and characterization of advanced materials and systems, such as a microscope (500x) equipped with a digital camera, a microwave plasma (oxygen, argon), a spin coating deposition system and a Van der Pauw system (4 points) for measuring thin films resistivity.

Microscope (50x) with digital camera
Microscope (50x) with digital camera

The clean room also contains a materials printer (lithography fluid) currently under development and optimization of processes which will become available to external users in the coming months. All persons interested for an independent use of such equipment or into access the cleanroom must necessarily follow a prior training with Ms. Marianne Crépel.