A Research Center on Nanomaterials and Energy
 
Deposition System / eBeam evaporator (EBPVD)
Site : Micronanofabrication component (Room CB-3405)
Contact : Alexandre Robichaud.

Instrument description :


Evaporation is a common method of thin film deposition. The source material is evaporated in a vacuum. The vacuum allows vapor particles to travel directly to the target object (substrate), where they condense back to a solid state. Evaporation is used in microfabrication, and to make macro-scale products such as metallized plastic film.

Electron Beam Physical Vapor Deposition or EBPVD is a form of physical vapor deposition in which a target anode is bombarded with an electron beam given off by a charged tungsten filament under high vacuum. The electron beam causes atoms from the target to transform into the gaseous phase. These atoms then precipitate into solid form, coating everything in the vacuum chamber (within line of sight) with a thin layer of the anode material.

Equipment Model : Homemade, N/A


Deposition System / eBeam evaporator (EBPVD), Homemade, N/A

Service fees :


For user fees, please visit the CoFaMIC website : http://www.cofamic.uqam.ca
  • Add 25$/h to fees is manipulation are made by an operator.
  • Add 15% of administration fee if industrial user.

Booking Terms :

  • For external users, please, take contact with Alexandre Robichaud.
  • For internal users, every users need to follow a formation with Alexandre Robichaud before use this facility. To make online reservation, click on the link in table below, then click on the day you want to make the booking. A more detailed schedule of the day will appear. You will then be able to book the time that suits to you.
  • To book this equipment from this page, click here.